HVPE Epitaxial Wafer

NCT’s β-Ga2O3 HVPE (Halide Vapor Phase Epitaxy) epitaxial wafers are designed for research and development of next-generation power devices, including Schottky barrier diodes (SBD) and transistors.

Available orientations include (001) in 2-inch and 100 mm, and (011) in 10×15 mm2 and 2-inch. Si-doping is available for 2-inch and 100 mm (001) epitaxial wafers. Epitaxial doping concentration and thickness can be customized within our technical capabilities.


 

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The specification for a 40 µm epitaxial layer thickness for the 2-inch (011) epitaxial wafer will be added to the datasheet once its commercial availability is confirmed.

 

2-inch / 100 mm β-Ga2O3 (001) epi-wafer (by HVPE)
(001)Ga2O3_Epi
The specifications of the HVPE epitaxial wafers and representative SBD performance characteristics are shown below. The epitaxial doping concentration and thickness can be customized within the range of our technical capabilities, so please feel free to contact us with your requirements.



planarSBD-Ga2O3EPI planarSBD







10×15 mm2 β-Ga2O3 (011) epi-wafer (by HVPE) *tentative
1015(011)Ga2O3_Epi



2-inch β-Ga2O3 (011) epi-wafer (by HVPE) *tentative
2-inch(011)Ga2O3_Epi

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