HVPE Epitaxial Wafer

We are currently selling 2-inch / 100 mm (001) epitaxial wafers and 10 × 15 mm2 / 2-inch (011) epitaxial wafers. The specification for a 40 µm epitaxial layer thickness for the 2-inch (011) epitaxial wafer will be added to the datasheet once its commercial availability is confirmed.
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2-inch / 100 mm β-Ga2O3 (001) epi-wafer (by HVPE)
(001)Ga2O3_Epi
The specifications of the HVPE epitaxial wafers and representative SBD performance characteristics are shown below. The epitaxial doping concentration and thickness can be customized within the range of our technical capabilities, so please feel free to contact us with your requirements.



planarSBD-Ga2O3EPI planarSBD







10×15 mm2 β-Ga2O3 (011) epi-wafer (by HVPE) *tentative
1015(011)Ga2O3_Epi



2-inch β-Ga2O3 (011) epi-wafer (by HVPE) *tentative
2-inch(011)Ga2O3_Epi

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