HVPE Epitaxial Wafer

We are currently selling 2-inch / 100 mm (001) epitaxial wafers and 10 × 15 mm2 (011) epitaxial wafers. For the 10 × 15 mm2 (011) epitaxial wafers, the specifications will be added to the specification sheet once the sales launch of the 40 µm epitaxial thickness is finalized.
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2-inch / 100 mm β-Ga2O3 (001) epi-wafer (by HVPE)
(001)Ga2O3_Epi
The specifications of the HVPE epitaxial wafers and representative SBD performance characteristics are shown below. The epitaxial doping concentration and thickness can be customized within the range of our technical capabilities, so please feel free to contact us with your requirements.



planarSBD-Ga2O3EPI planarSBD







10×15 mm β-Ga2O3 (011) epi-wafer (by HVPE) *tentative
2-inch(001)Ga2O3_Epi

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