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HVPE

Φ2 inch Epitaxial Wafer Grown by HVPE

Ga₂O₃ (001) plane Epitaxial Wafer grown by Halide Vapor Phase Epitaxy(HVPE)

MBE

Epitaxial Wafer Grown by MBE

Ga₂O₃ (010) plane Epitaxial Wafer grown by Molecular Beam Epitaxy(MBE)

(Al_xGa_1-x)₂O₃ Epitaxial Wafer Grown by MBE

Ga₂O₃ (010) plane (Al_xGa_1-x)₂O₃ Epitaxial Wafer grown by Molecular Beam Epitaxy(MBE)

基板

Ga₂O₃ bare substrates